Equipment FIB- Focused Ion Beam Brand JEOL JEM-9320FIB Specifications Ion Source Ga liquid-metal source Acc. Voltage 5 to 30 kV (5kV step variable) Magnification ×150 to ×300,000 (LOW MAG ×50) Max.Current 30nA Best image resolution 6nm (@30
| Equipment | FIB- Focused Ion Beam |
|---|---|
| Brand | JEOL JEM-9320FIB |
| Specifications | |
|---|---|
| Ion Source | Ga liquid-metal source |
| Acc. Voltage | 5 to 30 kV (5kV step variable) |
| Magnification | ×150 to ×300,000 (LOW MAG ×50) |
| Max.Current | 30nA |
| Best image resolution | 6nm (@30kV, WD30mm) |
| Tilt angle | ±60° |
| Sample movement | X Y ±1.2mm |
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